Method and apparatus for determining mis-registration
US5592573A · kind A · utility
21Cited by
9References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 11, 1994 |
| Grant date | Jan 7, 1997 |
| Priority date | — |
| Expiry date | Oct 11, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30108
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An image processing apparatus includes a data acquisition stage for acquiring data representative of several spatially separated regions of a sample. The apparatus also includes data storage means for storing reference data corresponding to the sample data. The two sets of data are compiled and analyzed to determine if the sample is shifted from a nominal position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.