Electron source and electron beam apparatus
US5594296A · kind A · utility
48Cited by
7References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 12, 1994 |
| Grant date | Jan 14, 1997 |
| Priority date | — |
| Expiry date | Dec 12, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2329/8625
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron source or electron beam apparatus comprises an electron-emitting device and a shield member disposed above the electron-emitting device. The electron-emitting device generates an electric field component, when energized, that is parallel to a substrate surface on which the electron-emitting device is disposed, while the shield member has an aperture which allows electrons emitted from the electron-emitting device to pass therethrough, but blocks off charged particles flying toward the electron emitting device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.