Method for correcting coordinate measurement on workpieces based on bending characteristics

US5594668A · kind A · utility

Assignee

• Carl Zeiss Stiftung · DE

Inventors

• Ralf Bernhardt · Aalen, DE
• Gunter Grupp · Böhmenkirch, DE

Key dates

• Filing date: May 30, 1995
• Grant date: Jan 14, 1997
• Expiry date: May 30, 2015

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B21/045
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Measured position data (Px, Py, Pz) are combined with stored correction values (DB) describing the elastic bending behavior of a coordinate measuring machine in that parameters characterizing the bending behavior are determined for several positions of the probe of the machine within the measuring range (30) of the machine, the acceleration-dependent components of these parameters are determined and stored in the form of correction values (c11, c22) which describe the bending behavior of the coordinate measuring machine as a function of the position (Px, Py, Pz) of measuring slides (22, 23, 24), and at least of the acceleration (ax, ay, az) of the measuring slides introduced via the drives, the correction values being combined with measured position data (Px, Py, Pz) of the coordinate measuring machine in subsequent coordinate measurements on workpieces.