Patent · US Expired

Method and apparatus for thermal treatment of materials containing vaporizable substances

US5595483A · kind A · utility

2Cited by

1References

43Claims

0Family size

Assignee

ALD VACUUM TECHNOLOGIES GMBH · DE

Inventors

Albrecht Melber · Darmstadt, DE
Erwin Wanetzky · Großkrotzenburg, DE
Dieter Uschkoreit · Kamen, DE

Key dates

Filing date	Mar 20, 1995
Grant date	Jan 21, 1997
Priority date	—
Expiry date	Mar 20, 2015

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02E20/34
WIPO fieldEnvironmental technology
WIPO sectorChemistry

Abstract

Materials containing vaporizable substances are exposed successively in at least two treatment chambers (10, 13, 14), which can be closed off with respect to each other, to a series of decreasing pressures and increasing temperatures. The vaporizable substances are exhausted separately from each treatment chamber (10, 13, 14) and at least partially condensed and collected. The solid materials are discharged from the last treatment chamber (14). The treatment chambers (10, 13, 14) can be closed off against each other, against the atmosphere, and against any other units which may be connected to them downline (17, 18) by vacuum valves (11, 12, 115, 16) and are connected to vacuum lines (10a, 13a, 14a) in which condensers (10b, 13b, 14b) and vacuum pumps (10c, 13c, 14c) are installed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.