Multilayer pillar structure for improved field emission devices
US5598056A · kind A · utility
31Cited by
10References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 31, 1995 |
| Grant date | Jan 28, 1997 |
| Priority date | — |
| Expiry date | Jan 31, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2329/864
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In accordance with the invention, a field emission device is provided with an improved pillar structure comprising multi-layer pillars. The pillars have a geometric structure that traps most secondary electrons and an exposed surface that reduces the number of secondary electrons. Processing and assembly methods permit low-cost manufacturing of high breakdown-voltage devices, including flat panel displays.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.