Capacitive accelerometer with a circuit for correcting stray capacitance perturbations
US5600066A · kind A · utility
11Cited by
10References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 1, 1995 |
| Grant date | Feb 4, 1997 |
| Priority date | — |
| Expiry date | Sep 1, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/131
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An accelerometer includes a silicon capacitive detector and an electronic device for measuring the capacitive unbalance of the detector, providing an output voltage representative of the acceleration. To avoid the perturbations caused by the stray capacitances present in the detector, there is provided a compensation system for injecting into the measurement system a predetermined correcting electric signal so that the output voltage of the accelerometer is substantially proportional to the ratio between the difference and the sum of the capacitances of the detector's capacitors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.