Controlled-immersion inspection
US5600068A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 16, 1995 |
| Grant date | Feb 4, 1997 |
| Priority date | — |
| Expiry date | Aug 16, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/101
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A controlled-immersion inspection mechanism gradually immerses a planar pattern of integrated circuits or other articles into a tank filled with water to a given level; across the tank there are two spaced parallel guide tracks along which two carriages, connected by a platform, move from an entry position above the water to an inspection position. In the inspection position the platform supports the articles, in an orderly array, for scanning inspection by a focussed energy beam, preferably an ultrasonic beam. A platform drive drives the platform between its entry and inspection positions. A mesh or other removable cover that permits water to flow but stabilizes article positions may cover the articles during immersion; the mesh is usually removed before scanning.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.