Piezoelectric/electrostrictive film element and method of producing the same
US5600197A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 28, 1994 |
| Grant date | Feb 4, 1997 |
| Priority date | — |
| Expiry date | Dec 28, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric/electrostrictive film element which includes a ceramic substrate having at least one window and an integrally formed diaphragm portion for closing each window, and a piezoelectric/electrostrictive unit including a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode, which are formed in this order on the diaphragm portion. The piezoelectric/electrostrictive layer consists of a dense body having a crystal grain size of not smaller than 0.7 .mu.m, and a porosity (x) of not greater than 15%, and the diaphragm portion has a deflection percentage (y) of 0-8%, which is a percentage of an amount of deflection of a central part of the diaphragm portion, with respect to a length of a shortest line which extends across the corresponding window and passes a center of the window. Further, the porosity (x) and the deflection percentage (y) satisfies the following formula: y.ltoreq.0.1167x.sup.2 -3.317x+25.5. Also disclosed are three methods for producing the piezoelectric/electrostrictive film element as described above.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.