Method and apparatus for fabricating superconductor device
US5602079A · kind A · utility
12Cited by
5References
6Claims
0Family size
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Key dates
| Filing date | Jun 6, 1994 |
| Grant date | Feb 11, 1997 |
| Priority date | — |
| Expiry date | Jun 6, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N60/0688
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A superconducting device having a superconducting film measures a characteristic such as its resonance frequency while in an environment having a temperature that is less than or equal to its superconducting transition temperature. A laser then thermally etches the superconducting film on the basis of said measurement in the environment having a temperature that is less than or equal to a superconducting transition temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.