Apparatus for combustive destruction of troublesome substances
US5603905A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 6, 1995 |
| Grant date | Feb 18, 1997 |
| Priority date | — |
| Expiry date | Dec 6, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
The disposal of troublesome substances, especially global-warming halogenated compounds is difficult enough, but is particularly difficult when associated with particulate-forming matter, such as silane and arsine commonly encountered in waste gas streams of the semiconductor industry. The combustive destruction of the troublesome substances in such a waste gas stream is simply and successfully achieved by injecting the stream admixed with fuel gas into a combustion zone surrounded by the radiant surface of a foraminous gas burner that is separately fed fuel gas and excess air sufficient to burn all the combustibles entering the combustion zone. A simple apparatus integrates the combustion zone with a quenching zone for the combustion product stream.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.