Polymeric thin layer materials
US5604038A · kind A · utility
16Cited by
11References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 18, 1994 |
| Grant date | Feb 18, 1997 |
| Priority date | — |
| Expiry date | Nov 18, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31895
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Liquid phase polymers deposited upon a substrate are cross-linked in the presence of a non-polymer-forming gas plasma to produce solid polymer coatings having improved chemical, thermal, and mechanical properties. The properties of the polymer layers formed in the method may be exploited by producing microelectronic circuitry, optical materials, and barrier coatings for a variety of substrate materials.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.