Semiconductor acceleration detecting device
US5606128A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 26, 1995 |
| Grant date | Feb 25, 1997 |
| Priority date | — |
| Expiry date | Dec 26, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P21/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor acceleration detecting device provided with a pedestal electrically and mechanically connected to an electrode mounted on a base with an electrically conductive adhesive, a semiconductor chip electrically and mechanically connected to the pedestal with an electrically conductive adhesive like a cantilever, and a strain gauge for detecting deformation of the semiconductor chip due to an applied acceleration. Current used for detecting detachment flows from the electrode into a wire connected to a grounding terminal through the pedestal and the semiconductor chip. Moreover, a detachment between the base and the pedestal or between the pedestal and the semiconductor chip is sensed by detecting whether the current flows normally. Thereby, erroneous acceleration of the object can be prevented from being measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.