Air filtering within clean environments
US5607647A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Oct 4, 1994 |
| Grant date | Mar 4, 1997 |
| Priority date | — |
| Expiry date | Oct 4, 2014 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D53/46
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An air filtering system for filtering air streams for use in a clean environment to effectively remove a process-limiting molecular contaminant therefrom comprising sequentially arranged upstream and downstream air filtering beds. The upstream air filtering bed is positioned to receive an air stream for use in the clean environment and comprises an upstream reagent selected to effectively remove the process-limiting molecular contaminant from the air stream as the air stream passes through the upstream air filtering bed, the upstream reagent releasing a characteristic volatile component into the air streams. The downstream air filtering bed is positioned to receive the air stream that has passed through the upstream air filtering bed and comprises a downstream reagent selected to remove the characteristic volatile component released by the upstream reagent into the air stream. Clean environments (e.g., a deep UV processing station) incorporating the above-mentioned air filtering system are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.