Article for use under high vacuum at high temperature
US5607775A · kind A · utility
2Cited by
4References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 15, 1995 |
| Grant date | Mar 4, 1997 |
| Priority date | — |
| Expiry date | Nov 15, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31692
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Proposed is an article of pyrolytic boron nitride such as crucibles for use at a high temperature under an extremely high vacuum as in the molecular beam epitaxy. The article can be used in the high temperature, high vacuum process without the conventional elaborate and time-consuming degassing bake-out treatment because the article is wrapped in a wrapping film having a specified low moisture permeability immediately after a preliminary degassing treatment under specified conditions before the article is wrapped under a low-moisture atmosphere in a glove box.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.