Method for detecting the concentration of the hydrogen peroxide vapor and the apparatus therefor
US5608156A · kind A · utility
30Cited by
13References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 23, 1995 |
| Grant date | Mar 4, 1997 |
| Priority date | — |
| Expiry date | Jun 23, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D3/022
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosure where the hydrogen peroxide vapor 4a is supplied to a treatment vessel, and a subject 1 to be treated in the treatment vessel 2 is subjected to a sterilization treatment by contact with the hydrogen peroxide vapor 4a, the concentration of the hydrogen peroxide vapor 4a in the treatment vessel 2 is detected directly and accurately on a real-time basis by a semiconductor gas sensor 8.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.