Single field emission device
US5610471A · kind A · utility
9Cited by
9References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 22, 1995 |
| Grant date | Mar 11, 1997 |
| Priority date | — |
| Expiry date | Mar 22, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2201/30423
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A field emission device (100) uses single crystals in order to eliminate grain boundaries within some or all of the electrodes (103, 104, and 205). The elimination of grain boundaries reduces susceptibility to damage, improves stability of the device (100), and improves uniformity and reproducibility among devices. In a preferred embodiment, the emitter and gate electrodes (103 and 104 respectively) are formed from a single crystal thin film (302). In other embodiments, other structures are employed wherein one or more of the electrodes (103, 104, and 205) are formed from single crystals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.