Compound vacuum pumps
US5611660A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 5, 1995 |
| Grant date | Mar 18, 1997 |
| Priority date | — |
| Expiry date | Oct 5, 2015 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D19/046
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A hybrid vacuum pump comprising a turbomolecular stage positioned at the inlet end of the pump and comprising a stator formed from an array of stationary blades and a rotor formed from a further array of blades arranged for rotation at high speed between the stator blades. A molecular drag stage is positioned at the outlet (high pressure) end of the pump and comprises at least two discs arranged for rotation within a stator with a minimal clearance between the circumferential edge of the discs and the stator. A flow passageway linking the turbomolecular stage with annular channels is defined between the stator and opposing faces of the discs and projections extending from the stator are provided for deflecting gas being pumped from the annular channels during rotation of the discs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.