Apparatus for transporting discoidal substrates in a vacuum coating apparatus

US5611858A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventor

• Jaroslav Zejda · Rodenbach, DE

Key dates

• Filing date: Oct 4, 1994
• Grant date: Mar 18, 1997
• Expiry date: Oct 4, 2014

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/6776
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

In an apparatus for the transport of discoidal substrates (3, 3', . . . ) through a treatment station or from a first to a second processing station (4 and 5, respectively) of a vacuum coating apparatus a motor unit (6) is provided, having three planar, positive conveyors driven by the latter, each having at least two sprockets (10, 10' and 12, 12') and a cogbelt (13, 14) guided over each sprocket pair, two of these conveyors being disposed to one another such that their sprockets (10, 10') extend in a common plane, the sprockets (12, 12') of a third conveyor extending in a plane which runs at right angles to the plane of the sprockets (10, 10') of the other two conveyors, and all three of the parallel strands of the three conveyors, which are at an angle to one another, being tangent to the outside edge of circular discoidal substrates (3, 3', . . . ) whose diameters correspond to the distance which the other two parallel strands of the first two conveyors have from one another and which extend in planes running across these strands, the cogbelts (13, 14) of the three conveyors being provided on their confronting outside surfaces with transversely running ribs or cleats whose numb…