Method and apparatus for manufacturing head drums coated with diamond-like carbon coating film using high-frequency plasma
US5611862A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 15, 1995 |
| Grant date | Mar 18, 1997 |
| Priority date | — |
| Expiry date | Aug 15, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B15/61
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus and method for simultaneously coating a large number of cylindrical substrates employs plural pairs of power electrode and the ground electrodes connected with an independent power sources in order to promote the uniform coating of the substrates. The apparatus uses a high-frequency plasma chemical deposition method and comprises a power supply system, a gas supply system, and a vacuum system. These systems are operatively connected to a reactor. The reactor comprises plural electrodes, workpiece supports, insulators, annular ground electrodes, gas outlets and gas supply means. The method comprises a step for stacking the substrates or the workpiece supports and combining them with the electrodes, a step for introducing gas to the reactor, a step for applying power to the power electrodes, and a step or maintaining the pressure in the reactor constant.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.