Device for suppressing flashovers in cathode sputtering installations
US5611899A · kind A · utility
68Cited by
6References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 20, 1995 |
| Grant date | Mar 18, 1997 |
| Priority date | — |
| Expiry date | Nov 20, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/0206
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An AC voltage source connected to at least one cathode is switched off rapidly upon the occurrence of a critical number of so-called "microarcs" which precede a "large arc". In order to be able to differentiate between large arcs and microarcs, a special counting and evaluation device is provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.