Method of making a residual gas sensor utilizing a miniature quadrupole array
US5613294A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 24, 1995 |
| Grant date | Mar 25, 1997 |
| Priority date | — |
| Expiry date | Mar 24, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49171
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention provides a method of manufacturing a gas sensor having multiple quadrupoles formed in an array by positioning a plurality of rods in an array of quadrupoles, forming a glass bead on the rods, positioning a source of electrons proximate to one end of the rods to ionize gas molecules, positioning an electrical lens proximate to the source of electrons to induce ionized gas molecules, positioning a collector proximate to the rods and displaced from the lens to receive the ionized gas molecules, providing electrical connections through the glass bead to the source of electrons, to the lens, to the collector and to the rods, and heating the glass beads formed on a plurality of rods positioned in the array of quadrupoles to grip and hold the rods in a cantilevered position to thereby seal the electrical connections.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.