Method for making planar optical waveguides
US5613995A · kind A · utility
57Cited by
22References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 25, 1994 |
| Grant date | Mar 25, 1997 |
| Priority date | — |
| Expiry date | Oct 25, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12176
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In accordance with the invention a planar waveguide device is fabricated by providing a substrate with an undercladding, depositing a particulate layer of core glass on the undercladding, consolidating the particulate layer by low temperature viscous sintering, patterning the consolidated layer to form an optical waveguide and applying an overcladding. The glass layers can be deposited quickly and economically by slurry dipping, centrifuging or electrophoresis. In a preferred embodiment the substrate is silicon, and the core glass is sodium-boro-silicate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.