Patent · US Expired

Cathode assembly

US5616226A · kind A · utility

2Cited by

2References

6Claims

0Family size

Assignee

Balzers und Leybold Duetschland Holding AG · DE

Inventors

Hans Kunz · Hasselroth, DE
Andreas Sauer · Großostheim, DE
Manfred Schuhmacher · Alzenau, DE
Joachim Szczyrbowski · Goldbach, DE
Dietmar Marquardt · Niederrodenbach, DE

Key dates

Filing date	Nov 7, 1995
Grant date	Apr 1, 1997
Priority date	—
Expiry date	Nov 7, 2015

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3497
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A pair of parallel elongate targets are fixed with respect to respective plates mounted in a vacuum chamber by means of clamps arranged along the longitudinal sides of each target, and an expandable wedge system between the rear plate and magnetic yokes on the backs of the targets. The wedge system for each target includes a wedge block having ramped surfaces which face outward, a pair of wedge jaws having ramped surfaces which slide against the ramped surfaces of the block, and a screw which draws the jaws together against the ramped surfaces of the block to expand the system and force the plate away from the yoke and fix the entire assembly in the clamps.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.