Field emission devices employing activated diamond particle emitters and methods for making same
US5616368A · kind A · utility
33Cited by
13References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 31, 1995 |
| Grant date | Apr 1, 1997 |
| Priority date | — |
| Expiry date | Jan 31, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2201/30457
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In accordance with the present invention, a field emission device is made by pre-activating ultra-fine diamond particles before applying them to the device substrate. This initial pre-activation increases manufacturing speed and reduces cost and reduces potential damage to the device substrate from exposure to high temperature hydrogen plasma.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.