Method of imaging using a polymeric photoresist having pendant vinylbenzyl thymine groups
US5616451A · kind A · utility
2Cited by
4References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 24, 1995 |
| Grant date | Apr 1, 1997 |
| Priority date | — |
| Expiry date | May 24, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0388
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Multi-functional vinylbenzyl and vinylphenyl pendant thymine (and uracil) groups are disclosed. The monomers can be used for the production of polymers useful in photoresist and other compositions as a function of the crosslinking reactivity of the pendant groups. Images in polymer are provided by exposure to actinic radiation (e.g., UV), containing such polymer and by solvent removal of non-exposed regions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.