Repair of digital micromirror device having white defects
US5617242A · kind A · utility
5Cited by
8References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 10, 1995 |
| Grant date | Apr 1, 1997 |
| Priority date | — |
| Expiry date | Jan 10, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of repairing mirror elements of a digital micromirror device (DMD) that have become stuck in an "on" position. The mirror element (10) is located and targeted with a laser beam. The wavelength, pulse duration, and power of the radiation is selected so that the mirror component (11) of the defective mirror element (10) will be ablated without affecting the underlying circuitry or neighboring mirror elements (10).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.