Mirror arrangement with a deformable mirror element
US5617261A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 15, 1995 |
| Grant date | Apr 1, 1997 |
| Priority date | — |
| Expiry date | May 15, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0825
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A mirror arrangement with a deformable mirror element, and which includes a housing which is provided for the retention of the mirror element, and whereby a cooling installation is provided for the conducting off of excess heat or thermal energy from the mirror arrangement. The cooling installation possesses a cooling chamber or space provided in the housing which is streamed through by a flow of a cooling medium and which, through an inherently stable separator element constituted from a good heat-conductive material, is spatially separated from a heat-conductive filled outer chamber which is located directly behind the base plate of the mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.