Patent · US Expired

Method of and system for electrically processing vacuum pressure information suitable for use in vacuum unit

US5617338A · kind A · utility

34Cited by
8References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 18, 1996
Grant dateApr 1, 1997
Priority date
Expiry dateMar 18, 2016

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01L9/08
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method of and a system for electrically processing vacuum pressure information, which is suitable for use in a vacuum unit. Pressure values are detected and a desired pressure value lower than the highest vacuum pressure value of the detected pressure values is displayed on a displaying device in digital form. The desired pressure value is stored in a storing device. Each of pressure values relative to vacuum, which are detected by a pressure detecting element held in front of a passage communicating with a vacuum port, is converted into a digital signal. The so-converted digital signal is digitally displayed on the displaying device. The desired pressure value stored in the storing device is compared with each of the detected pressure values relative to the vacuum, and information about faulty points is displayed on the displaying device based on the result of comparison.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.