Method for producing ceramic fine particles and apparatus used therefor
US5618580A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 15, 1995 |
| Grant date | Apr 8, 1997 |
| Priority date | — |
| Expiry date | Jun 15, 2015 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2004/86
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention provides a method for producing ceramic fine particles comprising the steps of supplying gaseous starting materials or starting material droplets to a reaction space arranged in an annular portion between inner and outer cylinders of a coaxial, double-cylinder reaction apparatus, the reaction apparatus having a stationary outer cylinder and a rotatable inner cylinder; and subjecting the gaseous starting materials or the starting material droplets to reaction in the reaction space while rotating the inner cylinder. Also, the present invention provides a production apparatus used therefor. In the present invention, by utilizing the Taylor vortex flow as the flow for a CVD reaction field or a pyrolytic reaction field, uniform ceramic fine particles can be produced at a high yield because of an even temperature distribution, and an even concentration distribution of the reaction gases or an even concentration distribution of the droplet number in the vortex flow, and residence time of the resulting fine particles locked in the vortex flow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.