Acceleration sensor and measurement method
US5618989A · kind A · utility
29Cited by
5References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 11, 1995 |
| Grant date | Apr 8, 1997 |
| Priority date | — |
| Expiry date | Sep 11, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An acceleration sensor has a seismic mass having movable electrodes. The movable electrodes are designed as differential capacitors between two fixed electrodes. Also provided are additional electrodes which are arranged opposite movable electrodes or opposite bending elements on which the seismic mass is suspended. Electrical voltages which are evaluated by the evaluation circuit as acceleration can be applied to the additional electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.