Apparatus and method for inspection of a patterned object by comparison thereof to a reference
US5619429A · kind A · utility
91Cited by
13References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 27, 1991 |
| Grant date | Apr 8, 1997 |
| Priority date | — |
| Expiry date | Nov 27, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection method including the steps of providing a patterned object to be inspected and compared with a reference, inspecting the patterned object and providing an output of information relating to the visual characteristics of the patterned object, comparing binary level information relating to the visual characteristics of the patterned object to binary level information relating to the visual characteristics of the reference, and comparing gray level information relating to the visual characteristics of the patterned object to gray level information relating to the visual characteristics of the reference.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.