Microwave plasma generator
US5620522A · kind A · utility
11Cited by
6References
34Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 26, 1995 |
| Grant date | Apr 15, 1997 |
| Priority date | — |
| Expiry date | Sep 26, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32697
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microwave plasma generator, wherein permanent magnets 3 forms intense magnetic field exceeding an intensity of electron cyclotron resonance magnetic field at microwave exit 6a of a dielectric body in an electron heating space chamber, the intensity of the magnetic field formed by the permanent magnet decreases rapidly to the zero at a point 14 in the vicinity of the boundary of the electronic heating space camber 1 and a plasma generating space chamber 2, and accordingly, most of electrons can be absorbed into electrons to heat and form high energy electrons at a position 12a-12c in electron cyclotron resonance layer 12.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.