Spring-loaded mount for a rotatable sputtering cathode
US5620577A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jan 24, 1996 |
| Grant date | Apr 15, 1997 |
| Priority date | — |
| Expiry date | Jan 24, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3441
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A rotatable magnetron cathode has one end adapted to be attached to a drive shaft and a free end supported by a yoke suspended from spring-loaded supporting devices attached to a sputtering chamber wall. A dark space shield is attached to the cathode where the cathode connects to the drive shaft of its motor so as to rotate with the cathode. Another dark space shield is attached at the free end of the cathode with an insulator bearing in between such that the cathode can rotate without causing the shield at its front to also rotate. An insulator pad is placed between the yoke and a metal cover piece attached to the shield at the front so as to keep the frontal dark space shield in an electrically floating condition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.