Method and circuitry for calibrating a micromachined sensor
US5621157A · kind A · utility
14Cited by
6References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 7, 1995 |
| Grant date | Apr 15, 1997 |
| Priority date | — |
| Expiry date | Jun 7, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P21/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
To calibrate an accelerometer having a ground plane, two fixed beams, and a movable beam centered between the fixed beams, a force/acceleration reference is produced by providing a change in voltage on the ground plane. Circuit gain is adjusted so that the output response indicates the force reference. The calibration method can be used to self-calibrate in response to an event, such as a power-up state. The calibration can be performed without shaking and can be used with either open or closed loop circuits.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.