Opto-electronic hybrid integration platform, optical sub-module, opto-electronic hybrid integration circuit and process for fabricating platform
US5621837A · kind A · utility
52Cited by
5References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 8, 1994 |
| Grant date | Apr 15, 1997 |
| Priority date | — |
| Expiry date | Aug 8, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/2068
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An opto-electronic hybrid integrated circuit of the present invention satisfy a low-loss optical waveguide function, an optical bench function and a high-frequency electrical wiring function. The circuit includes a substrate such as a silicon substrate, a dielectric optical waveguide part arranged in a recess of the substrate, and an optical device mounting part formed on a protrusion of the substrate. An electrical wiring part is disposed on the dielectric layer. The optical device is mounted on the substrate. An optical sub-module includes the optical device which is possible to mount on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.