Aerosol process for the manufacture of planar waveguides
US5622750A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 31, 1994 |
| Grant date | Apr 22, 1997 |
| Priority date | — |
| Expiry date | Oct 31, 2014 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03B2207/34
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A new method for the manufacture of glass films on substrates involves the flame reaction of an aerosol comprised of droplets of a solution containing all the precursors for the glass. A solution containing the precursors for all oxide components is atomized, and the resulting droplets are reacted in a flame to form spherical glass particles which are deposited on a heated substrate. By moving the substrate through the flame, a homogeneous deposit is achieved. Subsequent heat treatment in a furnace sinters the porous particle layer into a clear glass. The method has been successfully employed for the formation of sodium borosilicate glass films on silicon substrates and rare earth-doped multicomponent glass films for active devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.