Interferometric method for optically testing an object with an aspherical surface
US5625454A · kind A · utility
26Cited by
3References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 24, 1995 |
| Grant date | Apr 29, 1997 |
| Priority date | — |
| Expiry date | May 24, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M11/0271
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for testing an object with an aspherical surface. Based on the theory that an aspherical surface is composed of a plurality of spherical surfaces with different radii, the method tests the profile of said aspherical object by positioning the focus of an interferometer on the curvature centers of the plurality of spherical surfaces, recording the relative displacement of the aspherical object and the referenced spherical surfaces and calculating the aberrations therebetween.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.