Patent · US Expired

Method and apparatus for non-contact measurement of relative displacement

US5625457A · kind A · utility

2Cited by
4References
2Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 31, 1995
Grant dateApr 29, 1997
Priority date
Expiry dateOct 31, 2015

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01B11/16
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An apparatus for performing non-contact measurement of relative displacement includes a microscope having one objective lens and two fields of view in which two points of measurement on a test piece can be located separately, a pair of cameras for taking images obtained with the microscope, and an apparatus for measuring the relative displacement of the images of the two points of measurement obtained by the cameras.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.