Tilting positioner for a micropositioning device
US5627371A · kind A · utility
3Cited by
5References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 9, 1996 |
| Grant date | May 6, 1997 |
| Priority date | — |
| Expiry date | Feb 9, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning probe microscope positioner including an elongated rigid member which is controllably tilted in a predictable manner. One end of the rigid member is subjected to differential motion on opposite sides of its longitudinal axis so as to cause its opposite end to partake of lateral displacement which is a magnification of the differential motion. By a careful selection of component materials and sizes, inherent thermal compensation can be attained.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.