Hollow cathode array and method of cleaning sheet stock therewith
US5627435A · kind A · utility
113Cited by
9References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 15, 1996 |
| Grant date | May 6, 1997 |
| Priority date | — |
| Expiry date | Feb 15, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3266
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An array of hollow cathodes can be made by mounting a housing connected to a source of plasma precursor gas and to a source of power in a vacuum chamber, said housing having a plurality of uniformly spaced openings in a wall thereof into which a plasma can be generated. A substrate to be treated is mounted parallel to and spaced a preselected distance from said openings. In operation, a plurality of plasma torches is created extending from the openings which can plasma etch and remove coatings on said substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.