X-ray tube and microelectronics alignment process
US5627871A · kind A · utility
43Cited by
4References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 31, 1995 |
| Grant date | May 6, 1997 |
| Priority date | — |
| Expiry date | Jul 31, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J35/186
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A compact x-ray tube assembly comprises an evacuated chamber enclosed by a ceramic tubular envelope, an attached power supply at one end connected to an emitter inside the chamber, electrostatic means for focusing a beam of electrons on a metal foil target, an end window at the other end comprising said target, the thickness and composition of the metal foil target and the e-beam energy being selected to generate a microfocused bright beam of x rays of a preselected energy. The compact assembly is useful in a method for aligning or positioning layers used in the production of microelectronics components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.