Wavefront measuring system with integral geometric reference (IGR)
US5629765A · kind A · utility
70Cited by
13References
3Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 15, 1995 |
| Grant date | May 13, 1997 |
| Priority date | — |
| Expiry date | Dec 15, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J9/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A geometric sensor includes a Monolithic Lenslet Module (MLM) subaperture array having a plurality of microlenses, each of which have an opaque center formed concentric with the microlens optical axis, at the location of the lens chief ray, to produce an integral geometric reference (IGR) spot pattern of the lens array which is used to correct for sensor errors to an accuracy comparable with that achieved with reference plane wave calibration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.