Patent · US Expired

System for ablative imaging by proximity lithography

US5633123A · kind A · utility

27Cited by
27References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 20, 1995
Grant dateMay 27, 1997
Priority date
Expiry dateDec 20, 2015

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S430/165
  • WIPO fieldAudio-visual technology
  • WIPO sectorElectrical engineering

Abstract

A system for prolonging the useful life of a mask while ablating a pattern into a workpiece. The system includes a workpiece, a debris-blocking layer thereon, a laser directed toward the workpiece, and a mask provided between the laser and debris-blocking layer. The workpiece may be a data storage disk comprising a substrate and a magnetic coating thereon. The laser may be an ultraviolet laser and the debris-blocking layer should be transparent to the light emitted by the laser. The pattern may include concentric or spiral optical servo tracks in the magnetic coating. The debris-blocking layer minimizes degradation of the mask, thereby minimizing the need to clean the mask and prolonging the useful life of the mask.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.