Method of producing ceramic diaphragm structure having convex diaphragm portion
US5634999A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 31, 1995 |
| Grant date | Jun 3, 1997 |
| Priority date | — |
| Expiry date | Aug 31, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24942
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of producing a ceramic diaphragm structure, including a ceramic substrate having at least one window, and a ceramic diaphragm plate superposed on the ceramic substrate to close the window or windows. The method includes the steps of: firing the diaphragm plate with the ceramic substrate to form an integral sintered body, such that the diaphragm plate provides at least one diaphragm portion aligned with the window or windows; protruding each diaphragm portion outwards, in a direction away from the corresponding window, so that the diaphragm portion is formed into a convex shape; and controlling the amount of protrusion of the diaphragm portion, by pressing a jig having a flat surface or a concave surface, against a top part of the diaphragm portion having the convex shape, so that at least the top part has a flat surface or a curved surface having a predetermined radius of curvature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.