Heating plate for heating an object placed on its surface and chemical treatment reactor equipped with said plate

US5635093A · kind A · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Chantal Arena · Mesa, US
• Patrice Noel · Saint-Égrève, FR

Key dates

• Filing date: Feb 8, 1996
• Grant date: Jun 3, 1997
• Expiry date: Feb 8, 2016

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05B2213/07
• WIPO field: Control
• WIPO sector: Instruments

Abstract

A heating floor or plate for heating an object such as a substrate placed on its surface. A plate is provided whose surface temperature can be accurately adjusted so that the heat quantity supplied by two surface zones of the plate can be different even if the zones are small and contiguous. The plate has n zones, each having placed therein an electrically conducting heating element. n+1 sensors are used to measure the temperature of the plate, where n is an integer greater than 1. Data output from the sensors is processed and compared with at least one reference value and the result used to regulate the intensity of the current flowing in the elements based on the comparison.