Coupling for multiple masses in a micromachined device
US5635638A · kind A · utility
156Cited by
14References
26Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 6, 1995 |
| Grant date | Jun 3, 1997 |
| Priority date | — |
| Expiry date | Jun 6, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromachined device has two suspended masses positioned near each other, each of the masses being dithered along a dither axis. Two couplings, each including an arcuate member and an anchored support beam, are provided between the masses to allow relative anti-phase movement and to resist relative in-phase movement. The coupling extends around a region intermediate the masses where a dither detection device is disposed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.