Process for the characterization of an insulator and the corresponding electron microscope
US5635715A · kind A · utility
1Cited by
2References
5Claims
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Key dates
| Filing date | Jun 18, 1996 |
| Grant date | Jun 3, 1997 |
| Priority date | — |
| Expiry date | Jun 18, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Process and apparatus for the characterization of an insulator (5) at breakdown with the aid of an electron microscope (1), in which the electron flow rate of the beam (3) is adjusted as a function of in particular backscattered, lost, secondary or absorbed electrons. An automatic controller (9) sensitive to certain sensors (10,12) is provided for this purpose. The electron flow rate is proportional to the voltage to be simulated in the insulator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.