Apparatus for making contactless measurements of the thickness of an object made of transparent material
US5636027A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 25, 1995 |
| Grant date | Jun 3, 1997 |
| Priority date | — |
| Expiry date | Sep 25, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to an apparatus intended especially for making a contactless measurement of the thickness of measurement objects made of transparent material. In the course of this measurement, two opposing beams produced by a first and second radiation source are directed through first and second beam splitters and through a deflecting device consisting of a body of transparent material having reflecting and refracting boundary surfaces. Thereafter, the beams are directed obliquely onto the surface of the object to be measured. The first and second component beams are reflected off the forward and rearward surfaces, respectively, of the object and are directed through first and second beam splitters onto first and second detecting devices. In order to facilitate a compact configuration and higher measurement precision, the first and second beam splitters define the incidence surfaces of the deflecting device facing towards the radiation sources.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.