Field emission element and process for manufacturing same
US5637023A · kind A · utility
34Cited by
6References
8Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jul 7, 1994 |
| Grant date | Jun 10, 1997 |
| Priority date | — |
| Expiry date | Jul 7, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J3/022
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A field emission element features an emitter which has rectangular projections at its distal end capable of readily controlling the interval between electrodes in increments as small as sub-microns, in order to reduce the voltage at which the device starts field emission at the required level and to improve emission uniformity. An emitter (2,20), a collector (3,21) and a gate (5,22) are arranged on a substrate (1), which is formed with a recess (4) in proximity to the electrodes (2,3,20,21) other than the gate (5). The gate (5) is provided in the recess (4).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.