Patent · US Expired

Method and apparatus for processing a specimen

US5637538A · kind A · utility

2Cited by

3References

4Claims

0Family size

Assignee

ACT Advanced Circuit Testing Gesellschaft · DE

Inventors

Jürgen Frosien · Riemerling, DE
Dieter Winkler · Munich, DE
Hans-Peter Zimmermann · Waldbronn, DE

Key dates

Filing date	Nov 21, 1994
Grant date	Jun 10, 1997
Priority date	—
Expiry date	Nov 21, 2014

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31744
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

The invention relates to a method and to apparatus for processing a specimen, particularly an integrated circuit, in which an area of the specimen to be processed is scanned with a corpuscular beam and at least one gas is supplied above the area to be processed so that with the aid of the corpuscular beam a chemical reaction takes place on the area to be processed. The processing speed can be markedly increased by the use of a magnetic field in the region of the probe.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.